| 000 | 01227nam a22003497 4500 | ||
|---|---|---|---|
| 001 | BDZ0000031897 | ||
| 003 | StDuBDS | ||
| 005 | 20190430120202.0 | ||
| 008 | 900214s1989 enk | 001 | eng d | ||
| 020 |
_a9780471812425 _c£31.65 |
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| 020 | _a9780471812425 | ||
| 040 |
_aUk _cUk _dStDuBDSZ |
||
| 100 | 1 |
_aO'Hanlon, John F., _d1937- |
|
| 245 | 1 | 2 | _aA user's guide to vacuum technology. |
| 250 | _a2nd ed. | ||
| 260 |
_bWiley, _cc1989. |
||
| 300 | _axvii,481p. | ||
| 520 | 8 | _aThis volume introduces the reader to the theory and practice of modern vacuum technology, with applications. It focuses on the understanding, operation and selection of equipment for vacuum processes used in semiconductor, optical and related technologies. | |
| 650 | 0 |
_aVacuum technology _xHandbooks, manuals, etc |
|
| 650 | 0 |
_aVacuum technology _913959 |
|
| 650 | 7 |
_aTribology (friction & lubrication) _2thema |
|
| 650 | 7 |
_aFluid mechanics _2thema |
|
| 650 | 7 |
_aElectronics & communications engineering _2thema |
|
| 650 | 7 |
_aPhysics _2thema |
|
| 902 | _a170103 | ||
| 907 |
_a.b10170595 _bm _c- |
||
| 942 | _n0 | ||
| 969 | 0 | 0 | _a10058 |
| 979 | 0 | 0 |
_aAW _b04 JUN 1992 |
| 989 | 0 | 0 |
_aAW _b04 JUN 1992 |
| 998 |
_b2 _c001215 _dm _ea _f- _g2 |
||
| 999 |
_c11538 _d11538 |
||