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A user's guide to vacuum technology.

By: Material type: TextTextPublication details: Wiley, c1989.Edition: 2nd edDescription: xvii,481pISBN:
  • 9780471812425
  • 9780471812425
Subject(s): Summary: This volume introduces the reader to the theory and practice of modern vacuum technology, with applications. It focuses on the understanding, operation and selection of equipment for vacuum processes used in semiconductor, optical and related technologies.
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Item type Current library Call number Status Date due Barcode
General General ATU Dublin Road General Shelves 621.55 (Browse shelf(Opens below)) Available 013800

This volume introduces the reader to the theory and practice of modern vacuum technology, with applications. It focuses on the understanding, operation and selection of equipment for vacuum processes used in semiconductor, optical and related technologies.

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