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Fundamentals of semiconductor fabrication / Gary S. May, Simon M. Sze

By: Contributor(s): Material type: TextTextPublication details: Hoboken, NJ : Wiley, [2004]Description: xiii, 305 p. : ill. ; 26 cmISBN:
  • 9780471232797
  • 9780471232797
Subject(s): Summary: From crystal growth to integrated devices and circuits, this text offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence.
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Item type Current library Call number Status Date due Barcode
General General ATU Dublin Road General Shelves 621.38152 (Browse shelf(Opens below)) Available J124947

Includes bibliographical references and index

From crystal growth to integrated devices and circuits, this text offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence.

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